Computational lithography uses various techniques of resolution enhancement technology (RET) to create more perfect images on the chip as the elements of the transistor get smaller and smaller. THIS ...
Until EUV lithography becomes a reality, multiple patterning technologies such as triple litho-etch (LELELE), self-aligned double patterning (SADP), and self-aligned quadruple patterning (SAQP) are ...
A photolithographic technique that beams light through ultra-pure water in order to focus more sharply and create smaller transistor features. See photolithography. THIS DEFINITION IS FOR PERSONAL USE ...
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